Search > Browse Articles > Search



Regular Paper
A Digital Approach to via Edge Roughness Characterization and Quantification
Kuan Lu, Pengfei Lin, ChaBum Lee
Int. J. Precis. Eng. Manuf.-Smart Tech.. 2024;2(2):93-99.   Published online July 1, 2024
DOI: https://doi.org/10.57062/ijpem-st.2024.00010
                  
Industry Case Study
Cyber-Physical Systems Framework for Predictive Metrology in Semiconductor Manufacturing Process
Jay Lee, Huwei Dong, Dai-Yan Ji, Pradeep Kundu
Int. J. Precis. Eng. Manuf.-Smart Tech.. 2023;1(1):107-113.   Published online January 1, 2023
DOI: https://doi.org/10.57062/ijpem-st.2022.0010
                  
1 |
Volume3 No. 1
Journal Cover1 Journal Cover2
Editorial Office
12F, SKY1004 bldg., 50-1, Jungnim-ro, Jung-gu, Seoul 04508, Republic of Korea
TEL : +82-2-518-2928   E-mail : ijpem.st@kspe.or.kr
Developed in M2PI
Copyright © Korean Society for Precision Engineering.
Close layer
prev next